Superjunction semiconductor structure includes two layers of pn junctions in area contact, junctions in the first layer being closer together than those in the second

摘要

A low resistance layer (1) includes zones with differing types of conductivity (8a, 8b) defining intervening pn junctions. A second layer having zones with differing types of conductivity (18a, 18b) in alternation, defines further pn junctions and contacts an area of the first. Junctions in the second layer, have greater spacing than those in the first.