vakuumtechnisches drying halbleiterbruch

摘要

After the final washing stage the silicon grains are placed, in a perforated container, in a heated vacuum tight vessel of VA-2 or VA-4 steel, which is electro-polished or coated with a clean room compatible temperature resistant material, e.g. silicon, Teflon or PFA. A cycle of evacuation and flooding the vessel with extremely pure air with a relative humidity of less than 20% or a pure inert gas is repeated several times.