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Fabrication of metallic microstructures by micromolding nanoparticles
Fabrication of metallic microstructures by micromolding nanoparticles
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机译:通过纳米粒子的微成型制造金属微结构
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摘要
A method is provided for fabricating metallic microstructures, i.e., microcomponents of micron or submicron dimensions. A molding composition is prepared containing an optional binder and nanometer size (1 to 1000 nm in diameter) metallic particles. A mold, such as a lithographically patterned mold, preferably a LIGA or a negative photoresist mold, is filled with the molding composition and compressed. The resulting microstructures are then removed from the mold and the resulting metallic micro structures so provided are then sintered.
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