Electrodeposition in micromolds is an important step in processes such as LIGA, an acronym from the German words for lithography, electroforming and molding, for fabricating metallic microstructures. This paper investigates electrodepo sition in sacrificial polymeric micromolds with a conducting base and plastic features that provide insulating sidewalls for electrodeposition of the desired metallic micropart. Computa tional models for the governing transport and electrochemical phenomena are used to simulate the evolution of the electro deposition front. The effects of the applied voltage and mi-cromold geometry are systematically studied for their influ ence on the resulting electrodeposition rate and the homogene ity of the fabricated microparts. Conditions that lead to desira ble process and part quality are derived from the studies.
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