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Apparatus and method for the determination of grain size in thin films
Apparatus and method for the determination of grain size in thin films
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机译:测定薄膜中晶粒尺寸的装置和方法
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摘要
A method for the determination of grain size in a thin film sample comprising the steps of measuring first and second changes in the optical response of the thin film, comparing the first and second changes to find the attenuation of a propagating disturbance in the film and associating the attenuation of the disturbance to the grain size of the film. The second change in optical response is time delayed from the first change in optical response.
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