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Nozzle-injector for arc plasma deposition apparatus
Nozzle-injector for arc plasma deposition apparatus
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机译:电弧等离子体沉积装置的喷嘴喷射器
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摘要
A nozzle-injector was designed and fabricated for plasma deposition of thin-film coatings using a wall-stabilized arc torch as the plasma generator. The design of the nozzle-injector controls the injection, ionization, and reaction of the reagents, and these functions, in turn, determine the coating deposition rate, coating area, coating composition, and coating quality.
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