Method of setting a base energy level for an Auger electron spectroscopy analysis of a titanium nitride film, and method of analyzing the titanium nitride film

摘要

A quantitative and qualitative analysis of a nitrogen (N) kinetic energy peak in a spectrum of a titanium nitride (TiN) film using Auger Electron Spectroscopy (AES). The N kinetic energy peak analysis is used to set the base energy level of the AES, and is achieved by selecting a kinetic energy of an N peak which does not overlap with the Ti kinetic energy peak.