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Fabricating a hybrid imaging device having non-destructive sense nodes
Fabricating a hybrid imaging device having non-destructive sense nodes
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机译:制造具有非破坏性感测节点的混合成像装置
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摘要
A hybrid detector or imager includes two substrates fabricated under incompatible processes. An array of detectors, such as charged-coupled devices, are formed on the first substrate using a CCD fabrication process, such as a buried channel or peristaltic process. One or more charge-converting amplifiers are formed on a second substrate using a CMOS fabrication process. The two substrates are then bonded together to form a hybrid detector.
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