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ASIC design / manufacturing method, standard cell, embedded array, and multi-chip package

机译:ASIC设计/制造方法,标准单元,嵌入式阵列和多芯片封装

摘要

A manufacturing method for a three-dimensional MCM, having a standard cell or embedded array as a basechip, is provided. On the basechip an external chip is stacked with bumps sandwiching between them. In the case that the standard cell is employed as the base chip, the method comprises the steps of: logic designing a standard cell; designing layout of the macrocell, a bump pad and interconnections on a basechip; fabricating a mask pattern based on the result of designing layout; manufacturing the standard cell on the basechip using the mask pattern; and three-dimensionally assembling an external chip and the basechip via a bump provided on the bump pad. The logic designing is conducted based on a system specification defining various design conditions relating to the standard cell. The designing layout of the macrocell, a bump pad and interconnections on a basechip is conducted using the logic design result, macrocell cell information and bump pad cell information. The present invention also provides an MCM having a base chip which comprises an ASIC, such as a standard cell or an embedded array, manufactured using these automatically designed interconnections and a base chip needed when assembling this MCM. The present invention further provides a storage medium for storing data used in the above step of designing layout.
机译:提供了一种具有标准单元或嵌入式阵列作为基础芯片的三维MCM的制造方法。在基本芯片上,外部芯片堆叠在一起,凸块夹在它们之间。在将标准单元用作基础芯片的情况下,该方法包括以下步骤:逻辑设计标准单元;以及在基本芯片上设计宏单元,缓冲垫和互连的布局;根据布局设计结果制作掩模图案;使用掩模图案在基片上制造标准单元;并通过设置在所述凸块焊盘上的凸块三维组装外部芯片和所述基芯片。基于定义与标准单元有关的各种设计条件的系统规范进行逻辑设计。利用逻辑设计结果,宏单元单元信息和缓冲垫单元信息来进行宏单元,缓冲垫和基片上的互连的设计布局。本发明还提供了一种具有基本芯片的MCM,该基本芯片包括使用这些自动设计的互连制造的ASIC,例如标准单元或嵌入式阵列,以及在组装该MCM时所需的基本芯片。本发明还提供一种存储介质,用于存储在上述设计布局步骤中使用的数据。

著录项

  • 公开/公告号JP3268740B2

    专利类型

  • 公开/公告日2002-03-25

    原文格式PDF

  • 申请/专利权人 株式会社東芝;

    申请/专利号JP19970223663

  • 发明设计人 金子 義男;

    申请日1997-08-20

  • 分类号H01L21/82;G06F17/50;H01L21/60;H01L25/065;H01L25/07;H01L25/18;

  • 国家 JP

  • 入库时间 2022-08-22 01:01:53

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