Multilayer metal membrane base material, multilayer metal membrane lamination ceramic green sheet base material and layered product null for electronic parts

摘要

PURPOSE: To control exfoliating force from a substrate precisely by providing a first metal film having a plurality of pin holes on the substrate, and providing a second metal film on the first metal film layer by plating. ;CONSTITUTION: One surface of a substrate 1 composed of a polyethylene phthalate film is coated with silicone resin and mold release is performed. Next a first metal film 2 is formed by forming, on the substrate 1, a deposited film of silver having a plurality of pin holes A which have opening areas by 1-70%. Next on the first metal film 2 having the pin holes A, a second metal film is made out of palladium by electroplating to obtain a substrate for a multilayer metal film. Besides, a third metal film is formed by electroplating palladium on the second metal film 3, and a substrate for a multilayer metal film is obtained.;COPYRIGHT: (C)1995,JPO