Method and the coordinate measuring machine for point scan type contour decision of the material surface with automatic focus control principle

摘要

(57) Abstract Topic Purpose of this invention is method and the coordinate measuring machine which for the point scan type material surface decision with automatic focus control principle are improved. Solutions Relative movement possibly there is an optical device (16) which possesses the image formation optical path which has two optical paths of the length which differs to the probe (10) which distribution facilities is done, vis-a-vis the material surface. Contrast value husband is measured with end of two optical paths. In that case in order for contrast value to become equal, interval of the probe (10) for the material surface (14) is adjusted. The contour of the material surface is decided from position of the probe (10) for the material surface (14).