METHOD AND DEVICE MACHINING AND MEASURING LARGE ULTRAPRECISE ASPHERICAL SURFACE

摘要

PROBLEM TO BE SOLVED: To provide a method and a device for machining and measuring a large superprecise aspherical surface formed that (1) a shape can be measured on a machine without removing/re- mounting a work, (2) shape measuring precision can be further improved than machining precision by eliminating an influence on a moving error of a work during measurement of a shape, (3) and each of axes can be controlled by a computer program during machining and measuring at a real time, and this constitution enables a large superprecise X-ray mirror to be machined in a high-precise and excellent surface coarseness state with high efficiency.;SOLUTION: The device for machining and measuring a large superprecise aspherical surface comprises a worktable 14 to be capable of effecting NC control at least in a uniaxial direction with a work 1 fixed; a tool head 21 to which a conductive grinding wheel 4 to effect grinding of the work is attached; an ELID grinding device 22 to effect electrolytic dressing of the conductive grinding wheel as the work is machined; a differential type inclination measuring device 25 to be at least partially mounted on the tool head and measure the inclination angle of the surface to be machined of the work; and a program correcting device 30 to determine a shape error from a measured inclination angle and correct an NC program. ELID grinding and differential type inclination measurement are effected on the same machine without removing/reattaching the work.;COPYRIGHT: (C)2002,JPO