Inspection method, and survey instrument null of contact

摘要

PROBLEM TO BE SOLVED: To inspect contact holes for their opened states using a simple facility.;SOLUTION: A substrate moving mechanism 2 transports carriages 1, respectively carrying semiconductor devices 10 containing insulating films having contact holes. A corona discharge type electrostatically charging mechanism 3 electrostatically charges the surfaces of the insulating films, by attaching charged particles to the surfaces except the areas of the contact holes. A fine particle attaching mechanism 4 attaches charged fine particles to the insulating films, by utilizing the electrostatic forces acting between the charged particles attached to the insulating films and the fine particles. In this case, either the color or the light reflectance of the fine particles is made different from that of the insulating film. An optical inspection mechanism 5 detects an unopened contact hole by detecting the amounts of the fine particles attached to the insulating films by using an optical microscope, etc.;COPYRIGHT: (C)2000,JPO