APPARATUS AND METHOD FOR MANUFACTURING SUBSTRATE WASHING WATER, SUBSTRATE WASHING WATER MANUFACTURED BY THE SAME, AND METHOD FOR WASHING SUBSTRATE BY USING SUBSTRATE WASHING WATER

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing electrolytically ionized water which can manufacture electrolytically ionized water with which a semiconductor substrate or the like can be washed at a low cost, easily and harmlessly. SOLUTION: An aqueous electrolytic solution 2 filled in an electrolytic cell 1 is divided into an anolyte 2a and a catholyte 2b by a diaphragm 6 to which consists of a porous neutral film and through which water can freely flow. Particularly a cathode electrode 5 among electrodes to be used is provided with proper holes (2 to 4 mm in diamter and the total of the areas of the holes is specified to an effective opening area of 5 to 55% of the area of an electrode plate), by which the electrolyte can freely move between the front and rear of the electrode, and the electrolyte dissolved to saturated concentration in an anode electrode 4 and the cathode electrode 5 is easily exchanged with a dissolved solution of low concentration. Dissolution of gases into the electrolyte and generation of ions are efficiently performed, and consequently, negative pole reduced water is obtained at the cathode side.