Nd-Ba-Cu-O BASED HIGH TEMPERATURE SUPERCONDUCTING FILM AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an Nd-Ba-Cu-O based high temperature superconducting film on high quality when a substrate like an MgO single crystal substrate with inferior lattice matching is used.;SOLUTION: This superconducting film consists of a first layer 25 of Nd- Ba-Cu-O based high temperature superconducting material which is positioned on a substrate 21, and a second layer 27 of Nd-Ba-Cu-O based high temperature superconducting material which is positioned on the first layer 25. Cu composition of the first layer 25 is larger than that of the second layer 27. The superconducting film can be manufactured by a method wherein the first layer 25 is formed on the substrate 21 at 650-700°C by using material for the first layer, and the second layer 27 is formed on the first layer 25 at 800-850°C by using material for the second layer wherein the Cu composition is smaller than that of the material for the first layer.;COPYRIGHT: (C)2002,JPO