首页> 外国专利> METAL BASE FOR THIN FILM SUPERCONDUCTIVE WIRE ROD, MANUFACTURING METHOD OF METAL BASE FOR THIN FILM SUPERCONDUCTIVE WIRE ROD, AND MANUFACTURING METHOD OF THIN FILM SUPERCONDUCTIVE WIRE ROD

METAL BASE FOR THIN FILM SUPERCONDUCTIVE WIRE ROD, MANUFACTURING METHOD OF METAL BASE FOR THIN FILM SUPERCONDUCTIVE WIRE ROD, AND MANUFACTURING METHOD OF THIN FILM SUPERCONDUCTIVE WIRE ROD

机译:薄膜超导线棒的金属基底,薄膜超导线棒的制造方法以及薄膜超导线棒的制造方法

摘要

PROBLEM TO BE SOLVED: To provide a metal base for a thin film superconductive wire rod which inhibits the occurrence of the warpage due to a thermal contraction difference between a metal substrate and an intermediate layer even when formed into a wide shape where the intermediate layer is formed on the wide metal substrate and also inhibits the occurrence of defects in the subsequent processes, the oxide superconductive layer formation process, the stabilization layer formation process, and the thin film superconductive wire rod thinning process, and to provide a manufacturing method of the metal base for the thin film superconductive wire rod and a manufacturing method of the thin film superconductive wire rod.SOLUTION: A metal base for a thin film superconductive wire rod has an orientational ceramic layer located on a surface of a metal substrate and has a non orientational ceramic layer located on a rear surface of the metal substrate. A manufacturing method of the metal base for the thin film superconductive wire rod includes: a process where the metal substrate is heated in a deposition system and the orientational ceramic layer is formed on the surface of the metal substrate; a process where the metal substrate is heated in the deposition system and the non orientational ceramic layer is formed on the rear surface of the metal substrate; a process that is performed between the above processes and where the metal substrate on which the orientational ceramic layer or the non orientational ceramic layer is formed is taken out from the deposition system to be cooled. The metal base for the thin film superconductive wire rod is manufactured through these processes.
机译:解决的问题:提供一种用于薄膜超导线材的金属基体,该金属基体即使形成为宽形状的中间层也可以抑制由于金属基板和中间层之间的热收缩差而引起的翘曲的发生。形成在宽的金属基板上,并且还抑制后续工艺,氧化物超导层形成工艺,稳定层形成工艺和薄膜超导线材细化工艺中的缺陷的发生,并提供金属的制造方法解决方案:用于薄膜超导线材的金属基底具有位于金属基板表面上的定向陶瓷层,并且具有非定向性。位于金属基板的后表面上的陶瓷层。用于薄膜超导线材的金属基底的制造方法包括:在沉积系统中加热金属基板并且在金属基板的表面上形成定向陶瓷层的工艺;在沉积系统中加热金属基板,并在金属基板的背面形成无方向性陶瓷层的工序。在上述工序之间进行的,从形成有取向性陶瓷层或非取向性陶瓷层的金属基板从蒸镀系统中取出的工序进行冷却。通过这些过程制造用于薄膜超导线材的金属基底。

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