METHOD AND DEVICE FOR TREATING WASTE GAS IN SYNTHETIC QUARTZ MANUFACTURE

摘要

PROBLEM TO BE SOLVED: To provide a device for treating a waste gas, which is capable of withstanding the waste gas discharged in a synthetic quartz manufacture, having a high temperature over 200°C and containing silica powder and a hydrogen chloride gas.;SOLUTION: The silica powder contained in the waste gas discharged from the manufacturing process of synthetic quartz by gas phase hydrolysis is dust- collected with a ceramic-made filter 4. The filter 4 is cleaned by air blown from the opposed direction to the flow of the waste gas and preferably blown intermittently.;COPYRIGHT: (C)2002,JPO