By the ion beam device, and the ion beam device the processed conditional method of presentation

摘要

PURPOSE: To enable the processing conditions for each area to be processed to easily be recognized by superimposing the conditions of the area to be processed and the beam on the scanning ion microscope image displayed on a CRT for displaying them. ;CONSTITUTION: When each focusing beam specified in process patterns 1 to 3 is used to scam an area to be processed, a pattern of horizontal stripes is displayed in the area to be processed as shown in a process pattern 1 if the scan is made longitudinally of the screen while made laterally at high speed. Similarly, a pattern of vertical stripes is displayed in the area to be processed as shown in a process pattern 2 if the scan is made laterally of the screen while made longitudinally at high speed. The stripe patterns displayed in the respective process patterns 1 to 3 are made to have different colors, blue, orange and green. The density of the stripe pattern colors displayed in the respective process patterns 1 to 3 is changed in three grades, namely, light, medium and dark. For process patterns 4 and 5, the process pattern 5 is superimposed on the process pattern 4 and displayed in the order of processing.;COPYRIGHT: (C)1994,JPO&Japio