CHARGED PARTICLE BEAM ADJUSTING METHOD, OBSERVATION METHOD AND PROCESSING METHOD USING CHARGED PARTICLE BEAM, AND OBSERVATION DEVICE AND PROCESSING DEVICE USING CHARGED PARTICLE BEAM

摘要

PROBLEM TO BE SOLVED: To adjust an axis and a focus of an electron beam in a state of maintaining targeted allowable level of resolving power or the like.;SOLUTION: Electron beam is irradiated and projected with excitation setting condition of respective adjusting coils and lens coils stored in setting condition storage parts 23, 24, and a specimen 8 is observed, and the state of irradiation and projection of the electron beam are detected depending on an observed image (transmission image). Requested excitation condition of respective coils are made to change in compliance with the detected result, and the variation of excitation condition is compared with the criteria corresponding to the targeted allowable level stored in a criteria storage parts 25, 26, at a comparing part 27, and the variation of the excitation condition of the coils changed to exceed the criteria is displayed on an image display part 29 so that the image can be easily and visually recognized.;COPYRIGHT: (C)2003,JPO