METAL OXIDE PRECURSOR SOLUTION, METAL OXIDE THIN FILM AND METAL OXIDE POWDER

摘要

PROBLEM TO BE SOLVED: To provide a metal oxide precursor solution having excellent storage stability which is prepared using a liquid containing a metal alkoxide coordination complex obtained from a low cost metal salt, an alcohol and a basic aromatic compound solution as the raw material, to provide a metal oxide thin film with no crack formed from the solution, and to provide a metal oxide powder obtained by pulverization. SOLUTION: This metal oxide precursor solution is obtained by the steps of heating a metal salt, an alcohol and a basic aromatic compound solvent, adding an aromatic compound solvent and an alcoholic solution containing water, heating and concentrating. The metal oxide thin film is obtained by applying the precursor solution onto a substrate, drying and heat treating. The metal oxide powder is obtained by drying the precursor solution, heat-treating and pulverizing.