LIGHT SOURCE DEVICE, FLY EYE LENS USED FOR LIGHT SOURCE DEVICE AND EXPOSURE APPARATUS HAVING THE SAME LIGHT SOURCE DEVICE

摘要

PROBLEM TO BE SOLVED: To prevent an erroneous operation of a device manufacturing apparatus, an erroneous operation of another apparatus installed on a periphery of the manufacturing apparatus and a factory facility at a lamp lighting time of the manufacturing apparatus.;SOLUTION: An exposure apparatus comprises a conductive plate shaped in a mesh-like state to meet a delimiter of a fly eye lens 14 and disposed near the fly eye lens 14, which is integrated with a lamp house of the light source device. Thus, an external radiation of an electromagnetic noise to be radiated at a lighting time of a lamp 1 is eliminated.;COPYRIGHT: (C)2002,JPO