ANALYZING METHOD OF CHARGE DISTRIBUTION, ANALYZING METHOD OF ELECTROMAGNETIC FIELD, CHARGED PARTICLE OPTICAL SYSTEM, DESIGNING METHOD FOR IT, AND CHARGED PARTICLE BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an analyzing method of charge distribution as well as analyzing method of potential distribution which accurately analyzes charge distribution and potential distribution at a material to which charged particle beam or electromagnetic wave is projected, and analyzing method of electromagnetic field, charged particle optical system, designing method for it, and charged particle beam device.;SOLUTION: When analyzing charge distribution or potential distribution of a material to which charged particle beam or electromagnetic wave is projected, movement of charged particles is tracked by combining a Monte Carlo method and a method for resolving a diffusion equation of charged particles.;COPYRIGHT: (C)2002,JPO