CHARGED PARTICLE BEAM CONTROLLER, CHARGED PARTICLE BEAM OPTICAL DEVICE USING THE SAME, CHARGE PARTICLE BEAM DEFECT INSPECTION DEVICE AND CONTROL METHOD FOR CHARGED PARTICLE BEAM

摘要

PROBLEM TO BE SOLVED: To provide a charged particle controller, capable of inserting in a narrow space between lenses and correcting the orbit of charged particle beam and aberrations, a charged particle beam optical device thereof, a charged particle beam defect inspection device and a control method for charged particle beam.;SOLUTION: Beam controllers 11 and 12 are formed with electrodes 11a to 11d and electrodes 12a to 12d, arranged in the surrounding of the orbit of charged particle beam. Here, Au is coated on the inner surface 131 of a cylindrical insulator 13 for forming the electrodes 11a to 11d and electrodes 12a to 12d. The beam controllers 11 and 12 are placed on the insulator 13 along the orbit of the charged particle beam, so as to constitute a charged particle controller A.;COPYRIGHT: (C)2003,JPO