PLANAR MAGNETIC SENSOR AND PLANAR MAGNETIC SENSOR FOR ANALYZING MULTIDIMENSIONAL MAGNETIC FIELD

摘要

PROBLEM TO BE SOLVED: To measure magnetic field strength over a wide range in a short time.;SOLUTION: A planar magnetic sensor 10 is provided with a sensing layer 11, which consists of a magnetic resistance effect film with an arbitrarily sized planar formation, where a resistance value of the layer 11 is changed and a giant magnetic resistance effect is provided by changing the magnetization direction of magnetic fine particles due to the strength of magnetic field with a current that flows by a tunnel effect in the case of a voltage of a prescribed value or more than, and conductor layers 12, 13, which consist of a plurality of linear-shape conductors films 12a, 13a that are formed linear with a prescribed space along the direction of each face with lamination in each face of the magnetic resistance effect film. Each linear conductor film 12a that constitutes one layer 12 of the layers 12, 13 and each linear conductor film 13a that constitutes the other layer 13 are arranged so that both the films 12a, 13a have a positional relation such that the films 12a, 13a hold the magnetic resistance effect film between the films 12a, 13a and mutually cross in a plan view.;COPYRIGHT: (C)2002,JPO