Contactless torque sensor has layer of magnetoelastic material on shaft, sensor chip with integrated planar coils, ferromagnetic yoke and magnetic field sensitive components on substrate

摘要

The sensor has a layer of magnetoelastic material (C) on a shaft whose permeability varies with torsion-related mechanical stress on the shaft surface. A sensor chip is used with integrated planar coils (Sp) for magnetic stimulation, a ferromagnetic yoke (J) for flux guidance and magnetic field sensitive components (MD, MU) on a substrate (Su). At least three ferromagnetic strips on the shaft side carry concentrators (K1-K3). The yoke and two concentrators are arranged at a small separation only in a region in which the magnetic field sensitive components are located.