THIN FILM CRYSTALLINE Si SOLAR BATTERY AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an optical confinement structure without introducing a decrease in electrical characteristics while realizing optically optimum double- side rugged structure, by eliminating the relationship between optical characteristics and trade-off of the electrical characteristics in association with an introduction of the rugged structure.;SOLUTION: A thin film crystalline Si solar battery comprises a metal layer 2 as a rear electrode, a rear transparent conductive film 3, a semiconductor film 4 having a semiconductor junction formed of a crystalline Si in a photoactive layer, a front transparent conductive film 5, and collector electrodes 6 made in a main body of a metal as a surface electrode sequentially laminated on a substrate 1. In the battery, an interface between the layer 2 as the back electrode and the film 3 becomes a rugged shape. A mean height difference of the interface between the film 3 and the film 4 is smaller than that of the rugged shape of the interface between the layer 2 as the rear electrode and the film 3.;COPYRIGHT: (C)2002,JPO