首页> 外国专利> MANUFACTURING METHOD AND DEVICE FOR NEAR FIELD OPTICALPROBE, NEAR FIELD OPTICALPROBE, NEAR FIELD OPTICAL MICROSCOPE, NEAR FIELD LIGHT FINE PROCESSING DEVICE AND NEAR FIELD OPTICAL RECORD PLAYBACK DEVICE

MANUFACTURING METHOD AND DEVICE FOR NEAR FIELD OPTICALPROBE, NEAR FIELD OPTICALPROBE, NEAR FIELD OPTICAL MICROSCOPE, NEAR FIELD LIGHT FINE PROCESSING DEVICE AND NEAR FIELD OPTICAL RECORD PLAYBACK DEVICE

机译:近场光学探针,近场光学探针,近场光学显微镜,近场光精细处理装置和近场光学记录回放装置的制造方法和装置

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method and device for near field opticalprobe which can manufacture the near field opticalprobe with high resolu tion which prevents the probe tip from being melted and curled by laser irradia tion in a bending process of the near field opticalprobe by irradiation of the laser light and can manufacture the near field opticalprobe with high resolution. SOLUTION: In the manufacturing method of the near field opticalprobe which manufactures the near field opticalprobe by bending process in which the irradiated part is melted by laser irradiation and the tip part with the probe is bent from the root part, the bending process is carried out so that the near field opticalprobe is irradiated by the laser beam from an shifted angle from the perpendicular direction of the irradiation of the laser beam.
机译:解决的问题:提供一种近场光学探针的制造方法和装置,该方法和装置可以制造高分辨率的近场光学探针,从而防止探针尖端在近场光学探针的弯曲过程中由于激光辐照而熔化和卷曲。通过激光的照射,可以制造高分辨率的近场光学探头。解决方案:在通过弯曲工艺制造近场光学探头的近场光学探头的制造方法中,被辐照部分通过激光辐照融化,带有探针的尖端部分从根部弯曲,该弯曲过程要进行因此,从与激光束的照射的垂直方向偏离的角度以激光束照射近场光学探针。

著录项

  • 公开/公告号JP2002162332A

    专利类型

  • 公开/公告日2002-06-07

    原文格式PDF

  • 申请/专利权人 CANON INC;

    申请/专利号JP20000358816

  • 发明设计人 KURODA AKIRA;INAO YASUHISA;

    申请日2000-11-27

  • 分类号G01N13/14;B23K26/00;B82B3/00;G11B7/004;G11B7/135;G12B21/06;

  • 国家 JP

  • 入库时间 2022-08-22 00:54:08

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