FLIGHT TIME TYPE SPEED MEASURING DEVICE FOR GAS ATOM OR GAS MOLECULE

摘要

PROBLEM TO BE SOLVED: To realize an efficient speed analyzing where the effect of leakage of an electric field on an object is minimum while no speed distribution is distorted down to a slow speed region.;SOLUTION: A flight time type speed measuring device comprises an ionizing part (3) which ionizes the gas atom or gas molecule by laser irradiation, a drift tube (6) which leads in the ion generated at the ionizing part for speed separation, a two-stage acceleration converging part (8) which accelerates the ion passing the drift tube (6) while converges it spatially, and an ion detecting part (11) which detects the ion released from the two-stage acceleration conversing part (8). An electrically insulated pill-in part (7) is provided on the ionizing part side of the drift tube (6). The two-stage acceleration converging part (8) comprises a first grid (9) installed on the drift tube side and a second grid (10) installed on the ion detecting part side. A distance (d) between the first grid (9) and an ion release part of the drift tube (6) and a drift tube length L including the pull-in part are so set that L/d is 10-50.;COPYRIGHT: (C)2002,JPO