SUBSTRATE CARRIER, PAINT FILM FORMING APPARATUS AND PAINT FILM FORMING METHOD

摘要

PROBLEM TO BE SOLVED: To form a uniform-thickness paint film on a substrate.;SOLUTION: A substrate 31 the surface of which is applied with a fluid 32 as a paint film forming material is mounted in a first container 11 which is housed in a state of floating on a liquid 13 housed in a second container 12. The liquid 13 in the second container 12 is heated by a heater 20 to dry the fluid 32 on the substrate 31 to form a paint film 33.;COPYRIGHT: (C)2001,JPO