METHOD OF THERMALLY TREATING ZNSE CRYSTAL SUBSTRATE, THERMALLY TREATED SUBSTRATE, AND LIGHT EMITTING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a thermal treatment method for manufacturing a ZnSe crystal substrate that is electrically conductive, excellent in crystallinity, low in SA light emission intensity, high in reproducibility, and a ZnSe crystal substrate manufactured through the above method, and to provide an LED using the above crystal substrate. SOLUTION: Al is diffused into the ZnSe crystal substrate through a thermal treatment method, wherein an Al film is formed on the surface of the ZnSe crystal substrate, and the crystal substrate is thermally treated in an Se atmosphere in a closed vessel and successively thermally treated again in a Zn atmosphere in the closed vessel. The ZnSe crystal substrate obtained through the above method and a light emitting device using the above crystal substrate are provided.