Dynamic laser output power optimization

摘要

The control of output power of a laser beam generated by a laser system is accomplished on a tool by tool basis, using a position setting of an optical attenuator in conjunction with a repetition rate parameter of the laser beam. Two tables of data points representative of output power of the laser beam as a function of laser frequency and attenuation are generated. A scale factor is determined based on one of the tables, and is used to scale data stored in the other. The scaled data is then used to determine settings necessary to obtain the required output power of the laser beam. The tables are configured to have increased granularity around maximum usage region of the laser frequency and attenuation working range. As a result, the process can be done with high accuracy and within a reasonable time.