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Method of transferring a pattern of high structure density by multiple exposure of less dense partial patterns
Method of transferring a pattern of high structure density by multiple exposure of less dense partial patterns
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机译:通过多次曝光密度较小的局部图案来转移高结构密度图案的方法
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摘要
A pattern with small, densely packed structures is transferred from a structure carrier to an object. At least two partial patterns of less densely packed structure contents are produced from the densely packed structures in that those structures which are arranged close beside one another in the pattern on the structure carrier are assigned to various partial patterns if possible and separated from one another as a result. The partial patterns are then transferred to the object with a time offset and the structures are combined again as a result. This achieves a reduction in the structure density during the optical imaging process, so that the influence of disruptive structure interference on the imaging is reduced and thus denser structures can be imaged at the same wavelength.
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