Precise positioning actuator for head element, head gimbal assembly with the actuator and manufacturing method of actuator

摘要

A precise positioning actuator to be fixed to a head slider provided with at least one head element and to a support, for precisely positioning the at least one head element includes a pair of movable arms and a base section. Each movable arm is formed by a plate member including a first metal plate to be substantially in parallel with a side surface of the head slider. Top end sections of the pair of movable arms are capable of displacing in response to a drive signal applied to the actuator along a direction crossing planes of the metal plates. The base section is connected between rear end sections of the pair of movable arms and formed by a plate member including a second metal plate. The base section and the pair of movable arms are formed by adhering the first metal plates and the second metal plate that are individually formed.