首页> 外国专利> METHODS OF ENGAGING ELECTRICALLY CONDUCTIVE TEST PADS ON A SEMICONDUCTOR SUBSTRATE REMOVABLE ELECTRICAL INTERCONNECT APPARATUSES, ENGAGEMENT PROBES AND REMOVABLE ENGAGEMENT PROBES

METHODS OF ENGAGING ELECTRICALLY CONDUCTIVE TEST PADS ON A SEMICONDUCTOR SUBSTRATE REMOVABLE ELECTRICAL INTERCONNECT APPARATUSES, ENGAGEMENT PROBES AND REMOVABLE ENGAGEMENT PROBES

机译:在半导体衬底可移动的电气互连装置,接合问题和可移动的接合问题上接合导电测试垫的方法

摘要

A method of engaging electrically conductive test pads on a semiconductor substrate having integrated circuitry for operability testing thereof includes: a) providing an engagement probe having an outer surface comprising a grouping of a plurality of electrically conductive projecting apexes positioned in proximity to one another to engage a single test pad on a semiconductor substrate; b) engaging the grouping of apexes with the single test pad on the semiconductor substrate; and c) sending an electric signal between the grouping of apexes and test pad to evaluate operability of integrated circuitry on the semiconductor substrate. Constructions and methods are disclosed for forming testing apparatus comprising an engagement probe having an outer surface comprising a grouping of a plurality of electrically conductive projecting apexes positioned in proximity to one another to engage a single test pad on a semiconductor substrate.
机译:一种在具有集成电路的半导体衬底上接合导电测试垫以对其进行可操作性测试的方法,该方法包括:a)提供接合探针,该接合探针的外表面包括彼此相邻定位的一组多个导电突出顶点的组以进行接合半导体衬底上的单个测试垫; b)使顶点的分组与半导体衬底上的单个测试垫接合; c)在顶点和测试焊盘之间发送电信号,以评估集成电路在半导体衬底上的可操作性。公开了用于形成测试设备的构造和方法,该测试设备包括接合探针,该接合探针的外表面包括彼此相邻定位以接合半导体衬底上的单个测试垫的一组多个导电突出顶点的组。

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