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Optical systems for measuring form and geometric dimensions of precision engineered parts
Optical systems for measuring form and geometric dimensions of precision engineered parts
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机译:光学系统,用于测量精密工程零件的形状和几何尺寸
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摘要
The invention features a method for determining a geometric property of a test object, the method including: interferometrically profiling a first surface of the test object in a first coordinate system; interferometrically profiling a second surface of the test object in a second coordinate system different from the first coordinate system; providing a relationship between the first and second coordinate system; and calculating the geometric property based on the interferometrically profiled surfaces and the relationship between the first and second coordinate system. In some embodiments, the relationship may be determined by using calibrated gage blocks or by using a displacement measuring interferometer. Corresponding system are also described.
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