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Method for making thin film bulk acoustic resonators ( FBARS) with different frequencies on a single substrate and apparatus embodying the method
Method for making thin film bulk acoustic resonators ( FBARS) with different frequencies on a single substrate and apparatus embodying the method
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机译:在单个基板上制造具有不同频率的薄膜体声波谐振器(fbars)的方法和体现该方法的设备
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摘要
A method for fabricating a resonator, and in particular, a thin film bulk acoustic resonator (FBAR), and a resonator embodying the method are disclosed. An FBAR is fabricated on a substrate by introducing a mass loading top electrode layer. For a substrate having multiple resonators, the top mass loading electrode layer is introduced for only selected resonator to provide resonators having different resonance frequencies on the same substrate.
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