Pellicle frame and static bonding method for temporary and permanent attachment of pellicle frame to photomask substrate

摘要

A method and apparatus for temporarily attaching a pellicle membrane and frame to a photomask substrate until the assembly passes inspection, and then permanently bonding the frame to the substrate. In the preferred embodiment, a vacuum channel is provided in the pellicle frame to permit a vacuum to be drawn between the frame and the substrate. In alternate embodiments, a static adhesion is obtained between the flat surfaces of the pellicle frame and the substrate, and this static adhesion is improved by wiping a solvent on the bottom surface of the pellicle frame.