首页>
外国专利>
Method of self-assembly silicon quantum dots
Method of self-assembly silicon quantum dots
展开▼
机译:自组装硅量子点的方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
A method of self-assembling silicon quantum dots comprises the steps of providing a substrate, forming a thin amorphous Si film, and forming a plurality of Si quantum dots by controlling the energy and the shooting numbers of an excimer laser during an annealing process, wherein the excimer laser emits light on the thin amorphous Si film.
展开▼