Apparatus for synthesizing diamond film by DC PACVD

摘要

The present invention relates to a diamond film synthesizing apparatus, and in particular to an apparatus for increasing the deposition area to several inches in diameter by using multiple cathodes (Multi-cathode DC PACVD). In the multi-cathode DC PACVD apparatus according to the present invention, the basic array of the cathodes is determined so that the uniformity of diamond films on a deposition area is maximized. A seven-cathode structure, in which six cathodes are radially arranged at the same distance of 43 mm surrounding one central cathode, in which a basic unit of the array is regular triangle, is designed for depositing uniform diamond films on a 4″ substrate. Here, the shape of six edge cathodes is rod of which the lateral face is joined to the connecting rod, so that non-uniformity of temperature in the edge cathode is minimized and then the reliability of the apparatus is much enhanced. The multi(7)-cathode DC PACVD apparatus enables one to deposit 4″ diamond films with a thickness uniformity of 3.8% thicker than 1 mm. The unit of the cathode array according to the present invention can be adapted when increasing the deposition area to 8 inches, 12 inches, etc.