首页> 外国专利> Apparatus for synthesizing diamond film by DC PACVD

Apparatus for synthesizing diamond film by DC PACVD

机译:直流PACVD合成金刚石薄膜的装置

摘要

The present invention relates to a diamond film synthesizing apparatus, and in particular to an apparatus for increasing the deposition area to several inches in diameter by using multiple cathodes (Multi-cathode DC PACVD). In the multi-cathode DC PACVD apparatus according to the present invention, the basic array of the cathodes is determined so that the uniformity of diamond films on a deposition area is maximized. A seven-cathode structure, in which six cathodes are radially arranged at the same distance of 43 mm surrounding one central cathode, in which a basic unit of the array is regular triangle, is designed for depositing uniform diamond films on a 4″ substrate. Here, the shape of six edge cathodes is rod of which the lateral face is joined to the connecting rod, so that non-uniformity of temperature in the edge cathode is minimized and then the reliability of the apparatus is much enhanced. The multi(7)-cathode DC PACVD apparatus enables one to deposit 4″ diamond films with a thickness uniformity of 3.8% thicker than 1 mm. The unit of the cathode array according to the present invention can be adapted when increasing the deposition area to 8 inches, 12 inches, etc.
机译:金刚石膜合成装置技术领域本发明涉及金刚石膜合成装置,尤其涉及通过使用多个阴极(多阴极DC PACVD)将沉积面积增大至直径几英寸的装置。在根据本发明的多阴极DC PACVD设备中,确定阴极的基本阵列,使得在沉积区域上的金刚石膜的均匀性最大化。设计一种七阴极结构,其中六个阴极围绕一个中心阴极以43mm的相同距离径向排列,其中阵列的基本单位为正三角形,用于在4&Prime上沉积均匀的金刚石膜。基质。在此,六个边缘阴极的形状是杆,其侧面连接到连杆,从而使边缘阴极中温度的不均匀性最小化,然后大大提高了装置的可靠性。多(7)阴极DC PACVD装置可以沉积4&Prime。金刚石薄膜的厚度均匀性比1毫米厚3.8%。当将沉积面积增加到8英寸,12英寸等时,可以适应根据本发明的阴极阵列的单元。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号