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Micromachined two dimensional array of piezoelectrically actuated flextensional transducers
Micromachined two dimensional array of piezoelectrically actuated flextensional transducers
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机译:压电致动挠曲换能器的微机械二维阵列
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摘要
A transducer suitable for ultrasonic applications, fluid drop ejection and scanning force microscopy. The transducer comprises a thin piezoelectric ring bonded to a thin fully supported clamped membrane. Voltages applied to said piezoelectric ring excite axisymmetric resonant modes in the clamped membrane.
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