首页>
外国专利>
High photon energy range reflected light characterization of solids
High photon energy range reflected light characterization of solids
展开▼
机译:固体的高光子能量范围反射光表征
展开▼
页面导航
摘要
著录项
相似文献
摘要
Accuracy and sensitivity in the optical characterization of solids and solid materials are improved through the use of the interdependent features of: extending the photon energy range over which the metrology is performed to include a portion of the range up through 10 eV, in which, the higher photon energy of the light improves signal distinguishing ability; and providing a controlled ambient in the entire light path between the light source and a detector that prevents absorption and signal definiteness masking so as to sharpen the identifiability of the change parameters imparted into the reflected light. Combinations of specific devices and materials that for different types of ellipsometry are provided.
展开▼