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Method for implanting negative hydrogen ion and implanting apparatus
Method for implanting negative hydrogen ion and implanting apparatus
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机译:负氢离子注入方法及注入装置
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摘要
A method for implanting negative hydrogen ions includes the following steps. Plasma containing hydrogen is generated. Negative hydrogen ions are generated in the plasma. An electric field is formed between the plasma and a substrate. Negative hydrogen ions from the plasma is accelerated by using the electric field so as to implant negative hydrogen ions into a predetermined depth of a substrate.
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