Method and apparatus for non-destructive measurement of the thickness of the thin layers

摘要

Method and apparatus for non-destructive measurement of the thickness of thin layers.The invention relates to a method for non-destructive measurement of the thickness of the thin layers with a probe (11), which has a first device of coil (14) in an inner core.The geometric center (22) of the device of coil and the geometric center of at least one second coil device (31) coincide.At least the second device of coil (31) partially surrounding the first device of a coil (24), with an evaluation unit, which signals of the devices of the coil (24),31) are emitted during a measurement to determine the thickness of the layer, characterized in that a circuit (50) is provided, by which the first and at least second coil device (24,31) are excited in sequ00b3u00eancia during a measurement.