Method of fabricating an information carrier that can be read by scanning, method of fabricating a master mold, and device for fabricating a master mold

摘要

"METHOD OF MANUFACTURING AN INFORMATION HOLDER PASSABLE FOR OPTICAL SCANNING READING, METHOD OF MANUFACTURING A MASTER TEMPLATE, AND DEVICE FOR MANUFACTURING A MASTER TEMPLATE". The invention relates to a method of manufacturing a master mold (1), which is used to manufacture an optical information disc, such as a CD or DVD. According to the method, a substrate (3) is provided with a photosensitive layer (5), which is subsequently irradiated by means of a radiation beam (7). A liquid, such as water, is supplied into a clearance space (53) that is present between the photosensitive layer and an auxiliary lens (59) of the lens system disposed facing said layer. As a result, the size of the scan incident point is reduced and the information density of the information disc to be manufactured is increased. According to the invention, the liquid is supplied through a supply opening (69) which is positioned immediately adjacent to the auxiliary lens (59). Thus, the liquid supplied through the supply opening is transported immediately and exclusively into said clearance space (53), such that the amount of liquid to be supplied to fill the clearance space is limited. As a result, a homogeneous Couette liquid flow without air inclusions is obtained in the clearance space. This Couette flow does not cause any unwanted mechanical vibration from the lens system.