SILICON CAPACITIVE ACCELEROMETER

摘要

Microaccelerometer which comprises a movable silicon proofmass, constututed by two silicon masses and supported by metal beam means, which is constituted by two metal beams. The two metal beams are defined in a metal plate. The proofmass may be part of an intermediate component, which comprises the metal beam means and the two silicon masses. The Microaccelerometer may also comprising two exterior insulating glass plates, carrying stationary electrodes.