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LIQUID-CRYSTAL-ON-SILICON DISPLAY WITH PHOTOLITHOGRAPHIC ALIGNMENT POSTS AND OPTICAL INTERFERENCE LAYERS
LIQUID-CRYSTAL-ON-SILICON DISPLAY WITH PHOTOLITHOGRAPHIC ALIGNMENT POSTS AND OPTICAL INTERFERENCE LAYERS
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机译:硅光液晶显示,带光成像对准柱和光学干涉层
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摘要
LIQUID-CRYSTAL-ON-SILICON DISPLAY WITH PHOTOLITHOGRAPHIC ALIGNMENT POSTS AND OPTICAL INTERFERENCE LAYERS A method of forming an improved liquid-crystal-on-silicon display and resultant display is described, in whichthe device structure is enhanced by the photolithographybuilding of alignment posts among the mirror pixels of themicrodisplay.
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