System dynamically rigid metrology high bandwidth, measurement and control of intelligent industrial processes.

摘要

PROVIDING APPARATUS CONTROL IN REAL TIME ELEMENT OF A GOVERNMENT OPTICO including a pair DIRECTORS OF LASERS STABILIZED (52). EACH SLBD (52) includes a base, e-RAYS AND STABILIZATION APPARATUS mechanically coupled to the base (10), three lasers reference beam (13) AND RAYS STABILIZED LASER coupled to the base (10). RAYS AND ADDRESS EACH stabilization apparatus includes an GOVERNMENT AND OPTICAL DETECTOR axis tilt. THE ELEMENT OF GOVERNMENT OPTICO is optically coupled to LASER RAYS STABILIZED, and rules (56). THE reference subsystem includes three reference detectors (58) FIXED POSITIONED IN CONNECTION WITH PROVIDING A workpiece coordinate system PART OF A RIGID WORK LOCALLY. THREE LINKED DETECTORS (58) are respectively in OPTICAL COMMUNICATION WITH THREE LASERS reference beam (13). A processor receives and performs coordinate transformations on signals REFERENCED OUTPUT DETECTOR AND OUTPUT SIGNALS SENSOR DETECTOR tool to track a position of the tool relative to the coordinate system rigid workpiece.