SELF-COMPENSATED CERAMIC STRAIN GAGE FOR USE AT HIGH TEMPERATURES

摘要

A self-compensated sensor (10) isdisclosed which is fabricated by sputtering Pt andITO films that (12) were subsequently patterned.The sensor includes a wide band semiconductor andmetal. For generating experimental fata four Pt bondpads are presented (16a, 16b, 16c and 16d).