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Grating type spatial light modulators and method of manufacturing grating type spatial light modulators
Grating type spatial light modulators and method of manufacturing grating type spatial light modulators
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机译:光栅型空间光调制器和制造光栅型空间光调制器的方法
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摘要
A spatial light modulator having grating bars in parallel with each other and with underlying substrate. According to one embodiment of the invention, a spatial light modulator (601) is provided that employs B number of parallel bars (403) arranged to form a grating, where B is a number greater than 1, but only has S number of support posts (411) supporting the bars, where S /= 2B-1. Another embodiment of the invention provides a method for manufacturing a grating-type spatial light modulator that requires fewer manufacturing steps that conventional manufacturing methods.
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