GRATING TYPE SPATIAL LIGHT MODULATORS AND METHOD OF MANUFACTURING GRATING TYPE SPATIAL LIGHT MODULATORS

摘要

A spatial light modulator having grating bars in parallel with each other and with underlying substrate. According to one embodiment of the invention, a spatial light modulator (601) is provided that employs B number of parallel bars (403) arranged to form a grating, where B is a number greater than 1, but only has S number of support posts (411) supporting the bars, where S ≤ 2B-1. Another embodiment of the invention provides a method for manufacturing a grating-type spatial light modulator that requires fewer manufacturing steps that conventional manufacturing methods.